Silicon vibration sensor arrays with electrically tunable band selectivity
D. Scheibner, J. Wibbeler, J. Mehner, W. Dötzel, T. GessnerVolume:
8
Language:
english
Pages:
4
DOI:
10.1007/s00542-002-0100-2
Date:
August, 2002
File:
PDF, 206 KB
english, 2002