Chemical mechanical polishing as a toolbox for thin film magnetic head manufacturing
H. van Heeren, T. Bertens, F. Pronk, K. AttenboroughVolume:
9
Language:
english
Pages:
4
DOI:
10.1007/s00542-002-0104-y
Date:
January, 2003
File:
PDF, 191 KB
english, 2003