Microfabrication of massive parallel micromirror-lenses by X-ray LIGA technique: recent advances and prospects
R. Kupka, F. Bouamrane, S. MegtertVolume:
10
Language:
english
Pages:
7
DOI:
10.1007/s00542-002-0225-3
Date:
December, 2003
File:
PDF, 361 KB
english, 2003