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Fibre-optical MEMS switches based on bulk silicon micromachining
M. Hoffmann, P. Kopka, D. Nüsse, E. VogesVolume:
9
Language:
english
Pages:
5
DOI:
10.1007/s00542-002-0237-z
Date:
May, 2003
File:
PDF, 210 KB
english, 2003