Fabrication of on-chip microcapillary using photosensitive...

Microsystem Technologies 2003 / 10 Vol. 9; Iss. 8

Fabrication of on-chip microcapillary using photosensitive glass

S. Etoh, T. Fujimura, R. Hattori, Y. Kuroki
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Volume:
9
Language:
english
Pages:
5
DOI:
10.1007/s00542-003-0300-4
Date:
October, 2003
File:
PDF, 264 KB
english, 2003
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