An investigation on technologies to fabricate magnetic...

Microsystem Technologies 2004 / 03 Vol. 10; Iss. 3

An investigation on technologies to fabricate magnetic microcomponents for miniaturized actuator systems

T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen
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Volume:
10
Language:
english
Pages:
4
DOI:
10.1007/s00542-003-0352-5
Date:
March, 2004
File:
PDF, 259 KB
english, 2004
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