Micro wire EDM for high aspect ratio 3D microstructuring of...

Microsystem Technologies 2005 / 04 Vol. 11; Iss. 4-5

Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals

A. Schoth, R. Förster, W. Menz
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Volume:
11
Language:
english
Pages:
4
DOI:
10.1007/s00542-004-0399-y
Date:
April, 2005
File:
PDF, 399 KB
english, 2005
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