Incorporating design rules into the LIGA technology applied...

Microsystem Technologies 2004 / 12 Vol. 10; Iss. 10

Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer

C. Solf, A. Janssen, J. Mohr, A. Ruzzu, U. Wallrabe
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Volume:
10
Language:
english
Pages:
5
DOI:
10.1007/s00542-004-0406-3
Date:
December, 2004
File:
PDF, 405 KB
english, 2004
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