Yield strength of thin-film parylene-C

Microsystem Technologies 2004 / 08 Vol. 10; Iss. 5

Yield strength of thin-film parylene-C

C.Y. Shih, T.A. Harder, Y.C. Tai
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Volume:
10
Language:
english
Pages:
5
DOI:
10.1007/s00542-004-0428-x
Date:
August, 2004
File:
PDF, 425 KB
english, 2004
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