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Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers
V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, V. SaileVolume:
10
Language:
english
Pages:
6
DOI:
10.1007/s00542-004-0433-0
Date:
December, 2004
File:
PDF, 409 KB
english, 2004