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Improvements in graphite-based X-ray mask fabrication for ultradeep X-ray lithography
R. Divan, D.C. Mancini, S.M. Gallagher, J. Booske, D. Van der WeideVolume:
10
Language:
english
Pages:
7
DOI:
10.1007/s00542-004-0445-9
Date:
December, 2004
File:
PDF, 441 KB
english, 2004