Application of 3D gray mask for the fabrication of curved SU-8 structures
Kuo-Yung Hung, Fan-Gang Tseng, Hwai-Pwu ChouVolume:
11
Language:
english
Pages:
5
DOI:
10.1007/s00542-004-0458-4
Date:
April, 2005
File:
PDF, 402 KB
english, 2005