Fabrication of an accurately vertical sidewall for optical...

Microsystem Technologies 2005 / 12 Vol. 12; Iss. 1-2

Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating

T. Ikehara, R. Maeda
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Volume:
12
Language:
english
Pages:
6
DOI:
10.1007/s00542-005-0008-8
Date:
December, 2005
File:
PDF, 379 KB
english, 2005
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