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Influence of the frequency on fatigue of directly wafer-bonded silicon
Jörg Bagdahn, Michael Bernasch, Matthias PetzoldVolume:
12
Language:
english
Pages:
6
DOI:
10.1007/s00542-005-0029-3
Date:
April, 2006
File:
PDF, 415 KB
english, 2006