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High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process
H. Yang, Reiyu Chein, T. H. Tsai, J. C. Chang, J. C. WuVolume:
12
Language:
english
Pages:
6
DOI:
10.1007/s00542-005-0050-6
Date:
February, 2006
File:
PDF, 460 KB
english, 2006