A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide
Ching-Liang Dai, Wei-Chiang YuVolume:
12
Language:
english
Pages:
7
DOI:
10.1007/s00542-005-0077-8
Date:
July, 2006
File:
PDF, 629 KB
english, 2006