A micromachined tunable resonator fabricated by the CMOS...

A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide

Ching-Liang Dai, Wei-Chiang Yu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
12
Language:
english
Pages:
7
DOI:
10.1007/s00542-005-0077-8
Date:
July, 2006
File:
PDF, 629 KB
english, 2006
Conversion to is in progress
Conversion to is failed