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Membrane microcantilever arrays fabrication with PZT thin films for nanorange movement
Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguang ZhuVolume:
11
Language:
english
Pages:
6
DOI:
10.1007/s00542-005-0512-x
Date:
August, 2005
File:
PDF, 332 KB
english, 2005