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Multilayer Thickness Measurements below the Rayleigh Limit Using FMCW Millimeter and Terahertz Waves
Schreiner, Nina S., Sauer-Greff, Wolfgang, Urbansky, Ralph, von Freymann, Georg, Friederich, FabianVolume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19183910
Date:
September, 2019
File:
PDF, 3.41 MB
english, 2019