Reduction of diffraction effect for fabrication of very...

Microsystem Technologies 2005 / 07 Vol. 11; Iss. 7

Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology

Jun Zhang, Mary B. Chan-Park, Jianmin Miao, Tie T Sun
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Volume:
11
Language:
english
Pages:
7
DOI:
10.1007/s00542-005-0586-5
Date:
July, 2005
File:
PDF, 393 KB
english, 2005
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