Vacuum measurement in wafer level encapsulations by interference microscopy
A. Bosseboeuf, J. P. Grandchamp, C. Breluzeau, S. Lani, J. Palomo, D. BouvilleVolume:
12
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0160-9
Date:
September, 2006
File:
PDF, 366 KB
english, 2006