Micro-specific design flow for tool-based microtechnologies

Microsystem Technologies 2007 / 02 Vol. 13; Iss. 3-4

Micro-specific design flow for tool-based microtechnologies

Albert Albers, Norbert Burkardt, Tobias Deigendesch, Jochen Marz
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Volume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-006-0181-4
Date:
February, 2007
File:
PDF, 390 KB
english, 2007
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