Production issues for high aspect ratio Lobster-eye optics...

Microsystem Technologies 2007 / 03 Vol. 13; Iss. 5-6

Production issues for high aspect ratio Lobster-eye optics using LIGA

A. G. Peele, K. D. Vora, B.-Y. Shew, B. Loechl, E. C. Harvey, J. P. Hayes
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Volume:
13
Language:
english
Pages:
5
DOI:
10.1007/s00542-006-0188-x
Date:
March, 2007
File:
PDF, 374 KB
english, 2007
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