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Proton beam writing: a tool for high-aspect ratio mask production
J. A. van Kan, P. G. Shao, K. Ansari, A. A. Bettiol, T. Osipowicz, F. WattVolume:
13
Language:
english
Pages:
4
DOI:
10.1007/s00542-006-0192-1
Date:
March, 2007
File:
PDF, 268 KB
english, 2007