![](/img/cover-not-exists.png)
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
Sang H. Lee, Pan K. Kim, Wonkyu Moon, Geunbae LimVolume:
13
Language:
english
Pages:
9
DOI:
10.1007/s00542-006-0239-3
Date:
March, 2007
File:
PDF, 587 KB
english, 2007