Low voltage actuated RF micromechanical switches fabricated...

Microsystem Technologies 2006 / 10 Vol. 12; Iss. 12

Low voltage actuated RF micromechanical switches fabricated using CMOS-MEMS technique

Ching-Liang Dai, Jing-Han Chen
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Volume:
12
Language:
english
Pages:
9
DOI:
10.1007/s00542-006-0243-7
Date:
October, 2006
File:
PDF, 584 KB
english, 2006
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