Application of piezoelectric layers in electrostatic MEM...

Microsystem Technologies 2006 / 10 Vol. 12; Iss. 12

Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

Ghader Rezazadeh, Ahmadali Tahmasebi, Mikhail Zubstov
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Volume:
12
Language:
english
Pages:
8
DOI:
10.1007/s00542-006-0245-5
Date:
October, 2006
File:
PDF, 261 KB
english, 2006
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