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Probe recording technology using novel MEMS devices
J. P. Yang, J. Q. Mou, N. B. Chong, Y. Lu, H. Zhu, Q. Jiang, W. G. Kim, J. Chen, G. X. Guo, E. H. OngVolume:
13
Language:
english
Pages:
8
DOI:
10.1007/s00542-006-0267-z
Date:
May, 2007
File:
PDF, 667 KB
english, 2007