Nano-motion actuator with large working distance for...

Microsystem Technologies 2007 / 05 Vol. 13; Iss. 8-10

Nano-motion actuator with large working distance for precise track following

Shigeki Mori, Masato Furuya, Akihiro Naganawa, Yotsugi Shibuya, Goro Obinata, Kazuhiro Ouchi
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Volume:
13
Language:
english
Pages:
9
DOI:
10.1007/s00542-006-0278-9
Date:
May, 2007
File:
PDF, 693 KB
english, 2007
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