Piezoelectric unimorph miroactuators with X-shaped...

Microsystem Technologies 2007 / 05 Vol. 13; Iss. 8-10

Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films

Isaku Kanno, Yoshiro Tazawa, Takaaki Suzuki, Hidetoshi Kotera
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Volume:
13
Language:
english
Pages:
5
DOI:
10.1007/s00542-006-0283-z
Date:
May, 2007
File:
PDF, 447 KB
english, 2007
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