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Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
C. Feng, Ya-Pu Zhao, D. Q. LiuVolume:
13
Language:
english
Pages:
9
DOI:
10.1007/s00542-006-0285-x
Date:
April, 2007
File:
PDF, 403 KB
english, 2007