Out-of-plane motion of 260-nm thick guided-mode resonant...

Microsystem Technologies 2007 / 05 Vol. 13; Iss. 8-10

Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators

Yoshiaki Kanamori, Takashi Kitani, Kazuhiro Hane
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Volume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-006-0286-9
Date:
May, 2007
File:
PDF, 410 KB
english, 2007
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