Self-assembly of three dimensional micro mechanisms using...

Microsystem Technologies 2007 / 05 Vol. 13; Iss. 8-10

Self-assembly of three dimensional micro mechanisms using thermal shrinkage of polyimide

Kenji Suzuki, Hideaki Yamada, Hirofumi Miura, Hideaki Takanobu
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Volume:
13
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0303-z
Date:
May, 2007
File:
PDF, 434 KB
english, 2007
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