Development of Self-oscillating Ultrasonic Micromotor.
KASUGA, Masao, IINO, Akihiro, SUZUKI, Kenji, SUZUKI, MakotoVolume:
64
Year:
1998
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.64.1117
File:
PDF, 7.03 MB
1998