Linearized analysis of the deformation of ultra-thin...

Microsystem Technologies 2007 / 05 Vol. 13; Iss. 8-10

Linearized analysis of the deformation of ultra-thin lubricant films under gas pressures by the long wave equation

Shigehisa Fukui, Soichi Shimizu, Kiyomi Yamane, Hiroshige Matsuoka
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Volume:
13
Language:
english
Pages:
7
DOI:
10.1007/s00542-006-0359-9
Date:
May, 2007
File:
PDF, 417 KB
english, 2007
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