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Polymer microstructure generated by laser stereo-lithography and its transfer to silicon substrate using reactive ion etching
Yoshiaki Kanamori, Junya Sato, Takeshi Shimano, Shigeo Nakamura, Kazuhiro HaneVolume:
13
Language:
english
Pages:
6
DOI:
10.1007/s00542-007-0380-7
Date:
May, 2007
File:
PDF, 475 KB
english, 2007