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Study of an eletrostatically actuated torsional micromirror with compliant planar springs
Jianliang You, Muthukumaran Packirisamy, Ion StiharuVolume:
14
Language:
english
Pages:
10
DOI:
10.1007/s00542-007-0396-z
Date:
January, 2008
File:
PDF, 491 KB
english, 2008