Micromechanical characterization of electroplated permalloy films for MEMS
Xueping Li, Guifu Ding, Taeko Ando, Mitsuhiro Shikida, Kazuo SatoVolume:
14
Language:
english
Pages:
4
DOI:
10.1007/s00542-007-0408-z
Date:
January, 2008
File:
PDF, 258 KB
english, 2008