Design, modeling, and mechanical characterizations of...

Microsystem Technologies 2008 / 03 Vol. 14; Iss. 3

Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

Andojo Ongkodjojo, Francis E. H. Tay, S. M. Ashok, S. Vicknesh, R. Akkipeddi
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Volume:
14
Language:
english
Pages:
11
DOI:
10.1007/s00542-007-0429-7
Date:
March, 2008
File:
PDF, 640 KB
english, 2008
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