Stress engineering and mechanical properties of SU-8-layers for mechanical applications
J. Hammacher, A. Fuelle, J. Flaemig, J. Saupe, B. Loechel, J. GrimmVolume:
14
Language:
english
Pages:
9
DOI:
10.1007/s00542-007-0534-7
Date:
October, 2008
File:
PDF, 440 KB
english, 2008