Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen, Chunlei Kang, Xinlong Huang, Yangchao TianVolume:
14
Language:
english
Pages:
5
DOI:
10.1007/s00542-007-0542-7
Date:
October, 2008
File:
PDF, 337 KB
english, 2008