Modeling and characterization of a micromachined artificial...

Microsystem Technologies 2008 / 06 Vol. 14; Iss. 6

Modeling and characterization of a micromachined artificial hair cell vector hydrophone

Binzhen Zhang, Hui Qiao, Shang Chen, Jun Liu, Wendong Zhang, Jijun Xiong, Chenyang Xue, Guojun Zhang
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Volume:
14
Language:
english
Pages:
8
DOI:
10.1007/s00542-008-0560-0
Date:
June, 2008
File:
PDF, 657 KB
english, 2008
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