Reflectivity test of X-ray mirrors for deep X-ray lithography
V. Nazmov, E. Reznikova, A. Last, M. Boerner, J. MohrVolume:
14
Language:
english
Pages:
5
DOI:
10.1007/s00542-008-0581-8
Date:
October, 2008
File:
PDF, 221 KB
english, 2008