Stiction issues and actuation of RF LIGA-MEMS variable...

Microsystem Technologies 2008 / 10 Vol. 14; Iss. 9-11

Stiction issues and actuation of RF LIGA-MEMS variable capacitors

Darcy T. Haluzan, David M. Klymyshyn, Martin Börner, Sven Achenbach, Garth Wells, Timo Mappes, Jürgen Mohr
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Volume:
14
Language:
english
Pages:
6
DOI:
10.1007/s00542-008-0583-6
Date:
October, 2008
File:
PDF, 385 KB
english, 2008
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