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Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
N. Baron, J. Passave, B. Guichardaz, G. CabodevilaVolume:
14
Language:
english
Pages:
6
DOI:
10.1007/s00542-008-0596-1
Date:
October, 2008
File:
PDF, 411 KB
english, 2008