Mechanical behavior of a novel resonant microstructure for...

Microsystem Technologies 2009 / 02 Vol. 15; Iss. 2

Mechanical behavior of a novel resonant microstructure for magnetic applications considering the squeeze-film damping

A. L. Herrera-May, L. A. Aguilera-Cortés, L. García-Gonzalez, E. Figueras-Costa
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Volume:
15
Language:
english
Pages:
10
DOI:
10.1007/s00542-008-0658-4
Date:
February, 2009
File:
PDF, 765 KB
english, 2009
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