A nodal analysis model for the out-of-plane beamshape...

Microsystem Technologies 2009 / 02 Vol. 15; Iss. 2

A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

Rengang Li, Qing-An Huang, Weihua Li
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Volume:
15
Language:
english
Pages:
9
DOI:
10.1007/s00542-008-0662-8
Date:
February, 2009
File:
PDF, 413 KB
english, 2009
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