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Active linear guidances for micro actuators: alternative concepts and first prototypes
Berend Denkena, Stefan Brehmeier, Hans-Christian MöhringVolume:
14
Language:
english
Pages:
13
DOI:
10.1007/s00542-008-0679-z
Date:
November, 2008
File:
PDF, 897 KB
english, 2008