Technical progress in designing and controlling of active microsystems
S. Demmig, R. Gehrking, M. Hahn, K. Wiedmann, B. Ponick, H. H. Gatzen, A. MertensVolume:
14
Language:
english
Pages:
7
DOI:
10.1007/s00542-008-0683-3
Date:
November, 2008
File:
PDF, 463 KB
english, 2008