Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch
Xun-jun He, Qun Wu, Yue Wang, Ming-xin Song, Jing-hua YinVolume:
15
Language:
english
Pages:
7
DOI:
10.1007/s00542-008-0702-4
Date:
February, 2009
File:
PDF, 290 KB
english, 2009