UV surface exposure for low temperature hydrophilic silicon...

Microsystem Technologies 2009 / 02 Vol. 15; Iss. 2

UV surface exposure for low temperature hydrophilic silicon direct bonding

Xiaohui Lin, Guanglan Liao, Zirong Tang, Tielin Shi
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Volume:
15
Language:
english
Pages:
5
DOI:
10.1007/s00542-008-0703-3
Date:
February, 2009
File:
PDF, 332 KB
english, 2009
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